JPH0650982Y2 - 浸漬型基板処理装置 - Google Patents

浸漬型基板処理装置

Info

Publication number
JPH0650982Y2
JPH0650982Y2 JP15699088U JP15699088U JPH0650982Y2 JP H0650982 Y2 JPH0650982 Y2 JP H0650982Y2 JP 15699088 U JP15699088 U JP 15699088U JP 15699088 U JP15699088 U JP 15699088U JP H0650982 Y2 JPH0650982 Y2 JP H0650982Y2
Authority
JP
Japan
Prior art keywords
substrate
substrate processing
processing
processing liquid
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP15699088U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0276837U (en]
Inventor
敏朗 廣江
敏行 大崎
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dainippon Screen Manufacturing Co Ltd
Original Assignee
Dainippon Screen Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Dainippon Screen Manufacturing Co Ltd filed Critical Dainippon Screen Manufacturing Co Ltd
Priority to JP15699088U priority Critical patent/JPH0650982Y2/ja
Publication of JPH0276837U publication Critical patent/JPH0276837U/ja
Application granted granted Critical
Publication of JPH0650982Y2 publication Critical patent/JPH0650982Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
JP15699088U 1988-11-30 1988-11-30 浸漬型基板処理装置 Expired - Lifetime JPH0650982Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15699088U JPH0650982Y2 (ja) 1988-11-30 1988-11-30 浸漬型基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15699088U JPH0650982Y2 (ja) 1988-11-30 1988-11-30 浸漬型基板処理装置

Publications (2)

Publication Number Publication Date
JPH0276837U JPH0276837U (en]) 1990-06-13
JPH0650982Y2 true JPH0650982Y2 (ja) 1994-12-21

Family

ID=31436033

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15699088U Expired - Lifetime JPH0650982Y2 (ja) 1988-11-30 1988-11-30 浸漬型基板処理装置

Country Status (1)

Country Link
JP (1) JPH0650982Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2568799Y2 (ja) * 1990-07-10 1998-04-15 株式会社 カイジョー ウエハー処理装置
JPH071795Y2 (ja) * 1990-09-10 1995-01-18 大日本スクリーン製造株式会社 浸漬型基板洗浄装置
JPH071794Y2 (ja) * 1990-12-28 1995-01-18 大日本スクリーン製造株式会社 浸漬型基板処理槽
JP5490395B2 (ja) * 2008-10-07 2014-05-14 大日本スクリーン製造株式会社 基板処理装置及びその製造方法

Also Published As

Publication number Publication date
JPH0276837U (en]) 1990-06-13

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